Труды сотрудников института физики

/ B. A. Belyaev, A. V. Izotov, P. N. Solovev // Russ. Phys. J. - 2016. - Vol. 59, Is. 2. - P. 301-307, DOI 10.1007/s11182-016-0771-2. - Cited References:27. - This work was supported in part by State Assignment for R&D A3.528.2014K of Ministry of Education and Science of the Russian Federation to Siberian Federal University in 2014. . - ISSN 1064-8887. - ISSN 1573-9228РУБ Physics, Multidisciplinary

Аннотация: Based on the Monte Carlo method, a model of growth of thin films prepared by oblique angle deposition of particles is constructed. The morphology of structures synthesized by simulation is analyzed. To study the character of distribution of microstructural elements (columns) in the film plane, the autocorrelation function of the microstructure and the fast Fourier transform are used. It is shown that with increasing angle of particle incidence, the film density monotonically decreases; in this case, anisotropy arises and monotonically increases in the cross sections of columns, and the anisotropy of distribution of columns in the substrate plane also increases.

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Держатели документа:
Russian Acad Sci, LV Kirensky Inst Phys, Siberian Branch, Krasnoyarsk, Russia.
Siberian Fed Univ, Krasnoyarsk, Russia.
Siberian State Aerosp Univ, Krasnoyarsk, Russia.

Доп.точки доступа:
Izotov, A. V.; Изотов, Андрей Викторович; Solovev, P. N.; Соловьев, Платон Николаевич; Беляев, Борис Афанасьевич; Ministry of Education and Science of the Russian Federation [A3.528.2014K]