/ I. A. Tarasov [et al.]> // Tech. Phys. - 2012. -
Vol. 57,
Is. 9. - P. 1225-1229,
DOI 10.1134/S1063784212090241. - Cited References: 18. - This work was supported by Integration Project no. 22 of the Siberian and Far East Branches, Russian Academy of Sciences; a program of the Presidium of the Russian Academy of Sciences (project no. 27), the Federal Target Program "Human Capital for Science and Education in Innovative Russia" for 2009-2013, and the program "Spintronics" (project no. 4) of the Department of Physical Sciences, Russian Academy of Sciences.
. - ISSN 1063-7842
РУБ Physics, Applied
Аннотация: An algorithm is developed to perform rapid control of the thickness and optical constants of a film structure during growth. This algorithm is tested on Fe/SiO2/Si(100) structures grown in an Angara molecular-beam epitaxy setup. The film thicknesses determined during their growth are compared with X-ray spectral fluorescence analysis and transmission electron microscopy data.
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Держатели документа: [Tarasov, I. A.
Kosyrev, N. N.
Varnakov, S. N.
Ovchinnikov, S. G.
Zharkov, S. M.
Bondarenko, G.] Russian Acad Sci, Siberian Branch, Kirenskii Inst Phys, Krasnoyarsk 660036, Russia
[Tarasov, I. A.
Kosyrev, N. N.
Varnakov, S. N.] Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660014, Russia
[Shvets, V. A.
Tereshchenko, O. E.] Russian Acad Sci, Siberian Branch, Inst Semicond Phys, Novosibirsk 630090, Russia
[Zharkov, S. M.] Siberian Fed Univ, Krasnoyarsk 660041, Russia
[Shvets, V. A.] Novosibirsk State Univ, Novosibirsk 630090, Russia
Доп.точки доступа: Tarasov, I. A.; Тарасов, Иван Анатольевич; Kosyrev, N. N.;
Косырев,
Николай Николаевич; Varnakov, S. N.; Варнаков, Сергей
Николаевич; Ovchinnikov, S. G.; Овчинников, Сергей Геннадьевич; Zharkov, S. M.; Жарков, Сергей Михайлович; Shvets, V. A.; Bondarenko, S. G.; Tereshchenko, O. E.