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   ин-З 844.1
   A20

    Advanced RF MEMS
[Текст] : сборник / ed. by S. Lucyszyn. - Cambridge [и др.] : Cambridge univ. press, 2010. - XXVIII,412 p. : ill. ; 25 cm. - (The Cambridge RF and microwave engineering series). - Bibliogr. at the end of the chapters. - Ind.: p. 409-412. - ISBN 978-0-521-89771-6 : 2858.00 р.
Перевод заглавия: Достижения в области радиочастотных микроэлектромеханических систем
   Перевод заглавия: Достижения в области радиочастотных микроэлектромеханических систем
ГРНТИ
ББК З 844.1я43

Аннотация: This book is the work of 22 contributors, resulting in a comprehensive look at an important eveloping technology. It is organized as review, reliability and applicationsbeginning with a review of MEMS technologies, especially switches; continuing with an extensive look at reliability issues that have affected the ability to achieve commercial development; followed by a very useful summary of key MEMS applications in various reconfigurable systems. An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

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Lucyszyn, Stepan \ed.\
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