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Plasma-chemical synthesis of copper oxide nanoparticles in a low-pressure arc discharge / A. V. Uschakov [et al.] // Vacuum. - 2016. - Vol. 133. - P. 25-30, DOI 10.1016/j.vacuum.2016.08.007. - Cited References:36. - The work was performed with a support of the grant of the Russian Science Foundation (Project No. 16-19-10054) . - ISSN 0042-207X

РУБ Materials Science, Multidisciplinary + Physics, Applied
Рубрики:
VACUUM-ARC
   PLASMACHEMICAL SYNTHESIS
   THIN-FILM
   DEPOSITION
Кл.слова (ненормированные):
Copper oxide nanoparticles -- Low pressure arc discharge -- Plasma-chemical synthesis -- Paschen curve -- Similarity parameter
Аннотация: The influence of a pressure of gas mixture (10 vol% O2 + 90% N2) on an average size of copper oxide nanoparticles, produced in the plasma of low pressure arc discharge, has been studied as a basic process variable. A correlation between the dependence of average particle size on gas mixture pressure and the dependence of discharge gap voltage on product of interelectrode distance by a gas mixture pressure, has been found. The estimation was carried out by means of X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). A mathematical model of the cathode region, which shows the applicability of the similarity theory to the low pressure arc discharge, has been represented.

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Держатели документа:
Russian Acad Sci, Siberian Branch, Krasnoyarsk Sci Ctr, Krasnoyarsk 660036, Russia.
Siberian Fed Univ, Krasnoyarsk 660041, Russia.
Russian Acad Sci, Kirensky Inst Phys, Krasnoyarsk 660036, Russia.

Доп.точки доступа:
Uschakov, A. V.; Karpov, I. V.; Lepeshev, A. A.; Petrov, M. I.; Петров, Михаил Иванович; Russian Science Foundation [16-19-10054]
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